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Robust design of Si/Si3N4 high contrast grating mirror for mid-infrared VCSEL application |
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| Authors: | C Chevallier N Fressengeas F Genty J Jacquet |
| Institution: | 1. Supélec, 2 rue Edouard Belin, 57070, Metz, France 2. LMOPS, Laboratoire Matériaux Optiques, Photonique et Systèmes, EA 4423, Unité de Recherche Commune à l’Université Paul Verlaine, Metz et Supélec, 2 rue Edouard Belin, 57070, Metz, France |
| Abstract: | A Si/Si3N4 high contrast grating mirror has been designed for a VCSEL integration in mid-infrared (λ = 2.65?μm). The use of an optimization algorithm which maximizes a VCSEL mirror quality factor allowed the adjustment of the grating parameters while keeping large and shallow grating pattern. The robustness with respect to fabrication error has been enhanced thanks to a precise study of the grating dimension tolerances. The final mirror exhibits large high reflectivity bandwidth with a polarization selectivity and several percent of tolerance on the grating dimensions. |
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