Integration, processing and performance of low power thermally tunable CMOS-SOI WDM resonators |
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Authors: | Ivan Shubin Guoliang Li Xuezhe Zheng Ying Luo Hiren Thacker Jin Yao Namseok Park Ashok V. Krishnamoorthy John E. Cunningham |
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Affiliation: | 1. Oracle Labs, Oracle, 9515 Towne Centre Drive, San Diego, CA, 92121, USA 2. Department of Electrical and Computer Engineering, University of California, San Diego, 9500 Gilman Drive, La Jolla, CA, 92093, USA
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Abstract: | Ring waveguide resonating structures with high quality factors represent a key component in silicon photonic links. We demonstrate experimentally and validate numerically spectral tuning with a high efficiency of photonic ring structures when manufactured in a commercial 130?nm SOI CMOS technology with localized removal of back-side substrate using silicon micromachining methods. A comprehensive analysis is reported on the thermal tuning efficiency of tunable ring devices as a function of the ring’s size, type of thermal tuner and amount of back- and front-side post-CMOS micromachining. We further propose a path to maintain a high tuning efficiency of photonic devices with partially or completely removed SOI silicon substrate upon their hybridization to electronic driver chips. Such a platform opens up additional options for increased on-chip system functionality and dense integration in 3-D. |
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