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Nonlinear image self-filtering with liquid crystal spatial light modulator |
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| Authors: | K Harada M Itoh S Kotova A Naumov A Parfenov T Yatagai |
| Affiliation: | aInstitute of Applied Physics and Tsukuba Advanced Research Alliance, University of Tsukuba, Tsukuba, Ibaraki 305, Japan;bSamara Branch of Lebedev Physics Institute, Novo-Sadovaja 221, Samara 443011, Russia;cLebedev Physics Institute, Leninsky 53, Moscow, 117924, Russia and Electrotechnical Laboratory, Umezono 1-1-4, Tsukuba, Ibaraki 305, Japan |
| Abstract: | Nonlinear spatial filtering is realized due to the electro-optical effect in spatial light modulators (SLMs). Optical methods with nonlinear filtering are suggested for various optical applications such as optical inspection of photolithography masks, wavefront sensor, etc. A fast optical response of the SLM allows optical inspection with a video (or faster) rate. The optical system proposed is tolerant to the vibrations and temperature variations because of the dynamic properties of the SLM. |
| Keywords: | Spatial filtering Liquid crystals Spatial light modulators |
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