Modeling of certain nonuniform processes in semiconductor technology |
| |
| Authors: | B A Zon S B Ledovskii A N Likholet |
| |
| Institution: | (1) Voronezh State University, 394693 Voronezh, Russia |
| |
| Abstract: | In this paper two problems are formulated and solved: the problem of diffusion in a two-phase system with a moving boundary,
and the problem of taking into account the finite reaction rate for formation of the new phase. A numerical solution is found
by a variational method, which has a number of practical advantages.
Zh. Tekh. Fiz. 68, 75–82 (April 1998) |
| |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ |
|
