微变形镜在自适应光学中的应用与发展

自适应光学系统主要用于校正由大气湍流等引起的波前畸变,经过半个多世纪的发展,自适应光学系统已经应用到了许多领域。传统自适应光学系统中的变形镜在许多情况下已经不能满足自适应光学新发展的需要。随着微制造技术的发展,用微制造技术制作的新型微变形镜大大提高了致动单元的集成度,简化了电源,提高了可靠性,降低了自适应光学系统的体积和造价。综述了微变形镜技术的发展情况及其在自适应光学中的应用,并且讨论了其发展前景。

Development and application of MEMS DM in adaptive optics

Adaptive optics system is mostly used to compensate for aberrations caused by atmospheric turbulence.Half a century later,adaptive optics system has been applied in various fields.Deformable mirror of Conventional adaptive optics can not meet the requirement of the new development of adaptive optics in many cases.As the development of microfabrication,de- formable mirrors from this technology highly improves the integration of actuator unit,and makes the electrical source more sim- ple,enhances the reliability of the system,reduces the size and cost of conventional adaptive optics.The development of MEMS DM and its application in adaptive optics are summarized,the preview of MEMS DM is discussed.