| 离子辅助沉积氧化物薄膜的光学特性 |
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| 引用本文： | 汤雪飞,范正修.离子辅助沉积氧化物薄膜的光学特性[J].强激光与粒子束,1992,4(2):245-250. |
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| 作者姓名： | 汤雪飞 范正修 |
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| 作者单位： | 中国科学院上海光机所，中国科学院上海光机所 上海市800-211信箱 201800，上海市800-211信箱 201800 |
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| 摘 要： | 考察了不同离子、离子能量、离子束流密度等制备参数对离子辅助沉积的TiO_2、ZrO_2和SiO_2薄膜的折射率、吸收和激光损伤阈值等光学特性的影响。
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| 关 键 词： | 薄膜 离子辅助沉积 光学特性 |
OPTICAL PROPERTIES OF OXIDE COATINGS PREPARED BY ION ASSISTED DEPOSITION |
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| Tang Xuefei,and Fang Zhengxiu.OPTICAL PROPERTIES OF OXIDE COATINGS PREPARED BY ION ASSISTED DEPOSITION[J].High Power Laser and Particle Beams,1992,4(2):245-250. |
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| Authors: | Tang Xuefei and Fang Zhengxiu |
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| Institution: | Tang Xuefei,and Fang Zhengxiu
Shanghai Institute of Optics and Fine Mechanics,Academia Sinica,P.O.Box 800-211,shanghai 201800 |
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| Abstract: | Effects of ion energy, ion current intensity and ion species on refractive indices, optical absorptance and laser - induced damage thresholds of TiO2 , ZrO2 , SiO2 coatings deposited using ion assisted deposition were investigated. |
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| Keywords: | coating ion assisted deposition optical property |
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