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Synthesis of molybdenum disulfide particles by aerosol-assisted chemical vapor deposition
Authors:S. E. Aleksandrov  K. D. Filatov  K. S. Tyurikov
Abstract:It was shown that dimethylformamide can be, in principle, used as a solvent of ammonium thiomolybdate for obtaining molybdenum disulfide particles by the aerosol-assisted chemical vapor deposition method. IR Fourier spectroscopy was used to examine (NH4)2MoS4–C3H7NO liquid solutions and the thermal stability of dimethylformamide and ammonium thiomolybdate vapors. It was demonstrated that pyrolysis at temperatures of 700–900°C yields spherical molybdenum disulfide microparticles with average diameters in the range 0.6–1 µm and “onion” structure.
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