Performance Optimization of Phase-Shifting Interferometry Using Data Average on Wide Range Roughness Measurement

Performance optimization of phase-shifting interferometry was investigated using data average on wide range roughness measurement. The interferometry performance was strongly affected by data average and an optimal data averaging condition of minimal measurement error was found. The high limit roughness level which makes the data average available for the interferometry performance optimization providing a reproducible and smallest roughness was determined to be about 5 _A rms roughness. Therefore, the optimal interferometry performance absolutely required data average for finer surfaces than about 5 _A rms roughness. On the other hand, the optimal interferometry performance for surfaces rougher than about 10 _A rms required little data average. The reliability of the optimal performance of phaseshifting interferometry was checked.