Influence of plasma extraction on a cylindrical low-pressure RFdischarge: a PIC-MC study |
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| Authors: | Krimke R Urbassek HM |
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| Institution: | Fachbereich Phys., Kaiserslautern Univ.; |
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| Abstract: | A model is presented for plasma extraction from a cylindrical RF discharge. Even though the extraction geometry is two-dimensional, the model proposed here allows to discuss extraction in a one-dimensional geometry. Specific results are obtained for a low-pressure RF discharge between cylindrical electrodes with a high asymmetry. These are calculated with the help of a PIC-MC computer simulation. The influence of extraction on the plasma characteristics, the ionization efficiency, and the influence of an axial magnetic field are calculated and discussed |
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