| 有限尺寸方靶等离子体离子注入动力学的三维粒子模拟研究 |
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| 引用本文： | 王蓬,田修波,汪志健,巩春志,杨士勤. 有限尺寸方靶等离子体离子注入动力学的三维粒子模拟研究[J]. 物理学报, 2011, 60(8): 85206-085206. DOI: 10.7498/aps.60.085206 |
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| 作者姓名： | 王蓬 田修波 汪志健 巩春志 杨士勤 |
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| 作者单位： | 哈尔滨工业大学现代焊接生产技术国家重点实验室,哈尔滨 150001 |
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| 基金项目： | 国家自然科学基金(批准号:50773015,10775036)资助的课题. |
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| 摘 要： | 采用三维粒子模拟模型研究了有限尺寸方靶等离子体浸没离子注入过程中的鞘层动力学行为,得到了鞘层尺寸和方靶表面的注入剂量、注入能量以及注入角度等信息,并与二维无限长方靶注入结果进行了对比.模拟结果表明,与无限长方靶不同,有限尺寸方靶周围鞘层很快扩展为球形,但鞘层厚度明显减小.在模拟的50ω-1pi时间尺度内靶表面注入剂量很不均匀,中心区域注入剂量最小,四个边角附近位置注入剂量最大.这种剂量不均匀性是由于鞘层扩展为球形,使得鞘层内离子被聚焦并注入到边角附关键词：等离子体浸没离子注入数值模拟三维粒子模拟有限尺寸方靶
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| 关 键 词： | 等离子体浸没离子注入 数值模拟 三维粒子模拟 有限尺寸方靶 |
| 收稿时间： | 2010-06-02 |
Numerical simulation of plasma immersion ion implantation for cubic target with finite length using three-dimensional particle-in-cell model |
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| Wang Peng,Tian Xiu-Bo,Wang Zhi-Jian,Gong Chun-Zhi and Yang Shi-Qin. Numerical simulation of plasma immersion ion implantation for cubic target with finite length using three-dimensional particle-in-cell model[J]. Acta Physica Sinica, 2011, 60(8): 85206-085206. DOI: 10.7498/aps.60.085206 |
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| Authors: | Wang Peng Tian Xiu-Bo Wang Zhi-Jian Gong Chun-Zhi Yang Shi-Qin |
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| Affiliation: | State Key Laboratory of Advanced Welding Production Technology, Harbin Institute of Technology, Harbin 150001, China;State Key Laboratory of Advanced Welding Production Technology, Harbin Institute of Technology, Harbin 150001, China;State Key Laboratory of Advanced Welding Production Technology, Harbin Institute of Technology, Harbin 150001, China;State Key Laboratory of Advanced Welding Production Technology, Harbin Institute of Technology, Harbin 150001, China;State Key Laboratory of Advanced Welding Production Technology, Harbin Institute of Technology, Harbin 150001, China |
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| Abstract: | Plasma immersion ion implantation (PIII) of the square target with finite length is simulated using a three-dimensional particle-in-cell (PIC) plasma simulation in this paper.The incident dose,the impact angle and the implanted energy on the target surface are investigated.The results show that the sheath around the square target with finite length becomes spherical rapidly during PIII.And the three-dimensional sheath width is small apparently compared with the one simulated by two-dimensional PIC.And it is... |
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| Keywords: | plasma immersion ion implantation numerical simulation three-dimensional particle-in-cell cubic target with finite length |
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