电阻热蒸发镀膜与电子束蒸发镀膜对纳米球刻蚀方法制备二维银纳米阵列结构的影响

在使用纳米球刻蚀法制备二维银纳米点阵的过程中,使用不同的镀膜方法在同样的模板上得到了不同形貌的银纳米阵列结构.使用电阻热蒸发镀膜方法获得了六角排列的银纳米三角形阵列结构,使用电子束蒸发镀膜方法则获得了六角排列的银纳米环阵列结构.研究表明,沉积纳米粒子的粒径、表面纳米曲率效应和热能是形成不同结构形貌的纳米阵列结构的关键因素. 关键词： 银纳米阵列 电阻热蒸发 电子束蒸发 纳米球刻蚀

Effects of thermal evaporation and electron beam evaporation on two-dimensional patterned Ag nanostructure during nanosphere lithography

In the process of fabricating two-dimensional Ag nano-arrays via nanosphere lithography, different deposition methods present different lattice point shapes of Ag nanostructure. Nano-triangles are produced by thermal evaporation whereas nano-rings are obtained by electron beam evaporation although they are both of hexagonal lattice. It is indicated that the sizes, the surface nanocurvature, the thermal and the kinetic energies of the particles deposited are key factors controlling the formation of the shape of Ag lattice point.