Output and picosecond amplification characteristics of an efficient and high-power discharge excimer laser |
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| Authors: | Kenzo Miyazaki Toru Fukatsu Ichiro Yamashita Toshifumi Hasama Kawakatsu Yamada Takuzo Sato |
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| Affiliation: | (1) Laser Section, Optoelectronics Division, Electrotechnical Laboratory, 1-1-4, Umezono, Tsukuba, 305 Ibaraki, Japan;(2) Present address: Optoelectronic Industry and Technology Development Association, 20th Mori BLDG., 7-4, Nishi-shinbashi 2-chome, Minato-ku, 105 Tokyo, Japan |
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| Abstract: | Improvements in output pulse energy and efficiency of a conventional capacitor-transfer-type discharge excimer laser with automatic preionization have been achieved by extending the discharge volume and resulting moderate pumping of the active medium. The discharge laser produces a pulse energy of more than 1 J for XeCl, KrF, and ArF lasers in square beams of about 2×2 cm2, and the maximum overall efficiency observed is 2.9% for XeCl, 3.2% for KrF and 1.8% for ArF. The laser device has been involved in a picosecond ( 32 ps) XeCl laser amplification system, and was operated as an amplifier at a repetitive frequency of 10 Hz. Saturation fluence for XeCl laser was measured to be 1.4 mJ/cm2, and the picosecond pulse energy of 40 mJ was extracted from the amplifier.On leave from Ebara Corp., 6-6-7, Ginza, Chuo-ku, Tokyo 104, JapanOn leave from Mitsubishi Heavy Industries, LTD., 4-6-22, Kan-on shinmachi, Nishi-ku, Hiroshima 733, Japan |
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| Keywords: | 42.55 42.60 |
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