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Studies of structure and composition of a Pt-based basic electrode for deposition of PZT ferroelectric films on silicon substrates |
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| Authors: | V G Beshenkov A G Znamenskii V A Marchenko |
| Institution: | (1) Department of Biomedical Engineering, University of California, 3120 Natural Sciences II, Zot 2715, Irvine, CA 92697-2715, USA;(2) Department of Electrical Engineering and Computer Science, University of California, Irvine, CA, USA; |
| Abstract: | In this study it has been found that a TiO2/Ti double adhesion layer is used for SiO2/Si substrate and a YSZ layer is used for SiO2/Si and Si substrates to achieve high residual polarization of PZT layers on platinum. Epitaxial deposition of YSZ on Si(100) provides an atomically smooth platinum layer textured in the 100] direction. The produced PZT films are mostly textured in the 111] direction; their residual polarization is 5–15 μC/cm2. |
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