| Study on a MEMS silicon-based non-silicon mirror for an optical switch |
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| 引用本文： | 罗元,付红桥,黄尚廉. Study on a MEMS silicon-based non-silicon mirror for an optical switch[J]. 中国光学快报(英文版), 2003, 1(10) |
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| 作者姓名： | 罗元 付红桥 黄尚廉 |
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| 作者单位： | Institute of Optics and Electronics，Chongqing University，Chongqing 400044，Institute of Optics and Electronics，Chongqing University，Chongqing 400044，Institute of Optics and Electronics，Chongqing University，Chongqing 400044 |
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| 基金项目： | This work was supported by the Academician Fund of hongqing（No． 6795）． |
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| 摘 要： | A micro-electro-mechanical system (MEMS) silicon-based non-silicon mirror for a 2D optical switch is designed, fabricated and measured. The result shows that the mirror has good reflective performance. And driven by static electricity, it can rotate more than 10° at voltage less than 15 V. This kind of novel mirror will have good potential applications for MEMS optical switches.
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Study on a MEMS silicon-based non-silicon mirror for an optical switch |
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| Abstract: | A micro-electro-mechanical system (MEMS) silicon-based non-silicon mirror for a 2D optical switch isdesigned, fabricated and measured. The result shows that the mirror has good reflective performance.And driven by static electricity, it can rotate more than 10° at voltage less than 15 V. This kind of novelmirror will have good potential applications for MEMS optical switches. |
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