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Low Voltage Contrast with an SEM Transmission Electron Detector
Authors:François Grillon
Affiliation:(1) Centre des Matériaux, ENSMP/ARMINES/CNRS UMR 7633, 10 rue Henry Desbruères, BP 87, F-91003 Cedex, France
Abstract:The images obtained with a transmission electron detector in low voltage SEM show an evolution of the well known dark field and bright field contrast with the accelerating voltage. Monte Carlo simulations explain these contrasts by the evolution of the electron scattering angle and stopping power of the thin foil with the accelerating voltage.
Keywords:: SEM Transmission Electron Detector   low voltage SEM   STEM contrast.
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