H2对N2直流辉光放电电子行为的影响

通过用Monte Carlo方法模拟N₂-H₂ 混合气体直流辉光放电等离子体快电子行为，从不同H₂浓度的电子能量分布函数，电子密度以及e_f-N₂碰撞率等方面，研究了加H₂对氮辉光放电等离子体过程的影响. 研究结果表明: 随着H₂浓度的升高，电子的平均能量增加, 电子密度及e_f-N₂的各种非弹性碰撞率减小; 但在 关键词： 2-H₂辉光放电')" href="#">N₂-H₂辉光放电 Monte Carlo模拟 2碰撞率')" href="#">e-N₂碰撞率

Effect of adding hydrogen to a nitrogen glow discharge on electron behavior

The effect of adding hydrogen to a nitrogen dc glow discharge is investigated by using Monte Carlo code to simulate the electron behavior in the cathode dark space (CDS). It is shown that when increasing the percentage of H-2, the electron mean energy is increased, the electron density and various e-N-2 collision rates are decreased, and when adding small amounts of H-2 into nitrogen gas, e-N-2 dissociation and electron excitation rates can be enhanced under certain discharge conditions, which will contribute to increase the density of significant active nitrogen species (N*-2,N+,N) in discharge space. The hydrogen concentration is varied between 0% and 30%. These effects can be explained by the collisions taking place in the discharge. We have also compared our calculated results with experimental data.