Unique commercial applications of the sol-gel process in Japan |
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Authors: | Masayuki Yamane |
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Institution: | (1) The Circle for the Promotion of Science and Engineering, 4259 Nagatsuda-cho Midoriku, Yokohama 226-8503, Japan |
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Abstract: | Two unique commercial applications of the sol-gel process in Japan are presented. One application involves alkoxide-derived
nanometer-sized silica particles used in the final polishing of silicon wafers for the fabrication of integrated circuits.
The particles are cocoon-like in shape and have almost replaced conventional abrasives because of the advantages over spherical
particles of similar size in terms of obtaining high polishing efficiency for good surface finish. The other application concerns
the treatment of paper with an alkoxide solution for water repellent and oil resistance properties, which leads to new products
for disposable tableware or cooking ware for microwave oven use. |
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Keywords: | Nanometer-sized silica particle Polishing of silicon wafer Treatment of paper with methyltrimethoxysilane Water repellency Oil resistance |
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