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脊形InGaN激光器的温度分布及其对器件特性的影响
引用本文:李德尧,黄永箴,张书明,种明,叶晓军,朱建军,赵德刚,陈良惠,杨辉,梁骏吾.脊形InGaN激光器的温度分布及其对器件特性的影响[J].半导体学报,2006,27(3):499-505.
作者姓名:李德尧  黄永箴  张书明  种明  叶晓军  朱建军  赵德刚  陈良惠  杨辉  梁骏吾
作者单位:1. 中国科学院半导体研究所,集成光电子学国家重点联合实验室,北京,100083
2. 中国科学院半导体研究所,纳米光电子学实验室,北京,100083
摘    要:利用含时二维热传导模型分析了蓝宝石衬底上生长、制作的脊形InGaN激光器内波导层的温度分布和时间演化规律.由于较大的阈值电流和电压以及较差的衬底导热性能,脊形下波导层内会产生较高温升并在脊形内外形成较大的温度台阶.由于脊形波导的弱自建波导特性,这一温度台阶会对侧向模式的限制产生较大的影响.短脉冲工作下的时间分辨L-I测试以及时间分辨远场和光谱测试结果显示,脊形内外的温度台阶会改善波导对高阶模的限制,导致器件的阈值电流下降,斜率效率升高.而有源区的温升又会导致斜率效率的严重下降.

关 键 词:InGaN激光器  脊形波导  热模拟  阈值电流  斜率效率
收稿时间:2015-08-20

Temperature Distribution in Ridge Structure InGaN Laser Diodes and Its Influence on Device Characteristics
Li Deyao,Huang Yongzhen,Zhang Shuming,Chong Ming,Ye Xiaojun,Zhu Jianjun,Zhao Degang,Chen Lianghui,Yang Hui,Liang Junwu.Temperature Distribution in Ridge Structure InGaN Laser Diodes and Its Influence on Device Characteristics[J].Chinese Journal of Semiconductors,2006,27(3):499-505.
Authors:Li Deyao  Huang Yongzhen  Zhang Shuming  Chong Ming  Ye Xiaojun  Zhu Jianjun  Zhao Degang  Chen Lianghui  Yang Hui  Liang Junwu
Institution:State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Nano-Optoelectronics Laboratory,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Nano-Optoelectronics Laboratory,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Nano-Optoelectronics Laboratory,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
Abstract:Time-dependent thermal simulation of ridge-geometry InGaN laser diodes is carried out with a two-dimensional model. A high temperature in the waveguide layer and a large temperature step between the regions under and outside the ridge are generated due to the poor thermal conductivity of the sapphire substrate and the large threshold current and voltage. The temperature step is thought to have a strong influence on the characteristics of the laser diodes. Time-resolved measurements of light-current curves, spectra, and the far-field pattern of the InGaN laser diodes under pulsed operation are performed. The results show that the thermal lensing effect improves the confinement of the higher order modes and leads to a lower threshold current and a higher slope efficiency of the device while the high temperature in the active layer results in a drastic decrease in the slope efficiency.
Keywords:InGaN laser diodes  ridge waveguide  thermal simulation  threshold current  slope efficiency
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