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Characterization of electronic materials and devices by scanning near-field microscopy |
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| Authors: | LJ Balk R Heiderhoff JCH Phang Ch Thomas |
| Institution: | 1.Fachbereich Elektrotechnik, Informationstechnik, Medientechnik, Lehrstuhl für Elektronik,Bergische Universit?t Wuppertal,Wuppertal,Germany;2.Department of Electrical and Computer Engineering, Centre for Integrated Circuit Failure Analysis and Reliability (CICFAR),National University of Singapore,Singapore,Singapore |
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