Simple interference method of diffraction grating generation for integrated optics by the use of a Fresnel mirror

A very simple and compact arrangement is proposed for generation of surface periodic structures for integrated optics using laser exposition and photolithographic technique. The method applied is based on the division of a laser beam into two “half-wavefronts” by a Fresnel mirror (90°) with one arm formed by an exposed sample, and on interference of divided wavefronts on the sample surface.