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Molecular Layer Deposition of Silicon Nitride with Glow Discharge Activation |
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| Authors: | Ezhovskii Yu. K. Mikhailovskii S. V. |
| Affiliation: | 1.St. Petersburg State Technological Institute (Technical University), St. Petersburg, 190013, Russia ; |
| Abstract: | Russian Journal of Physical Chemistry A - The formation of silicon-nitrogen nanolayers obtained by molecular layer deposition on the GaAs surface with (100) and (110) orientations in the... |
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