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Optically monitoring and controlling epitaxial growth |
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| Authors: | D. E. Aspnes R. Bhat C. Caneau E. Colas L. T. Florez S. Gregory J. P. Harbison I. Kamiya D. E. Aspnes R. Bhat C. Caneau E. Colas L. T. Florez S. Gregory J. P. Harbison I. Kamiya V. G. Keramidas M. A. Koza M. A. A. Pudensi W. E. Quinn S. A. Schwarz M. C. Tamargo H. Tanaka |
| Affiliation: | Bellcore, Red Bank, New Jersey 07701-7040, USA |
| Abstract: | We provide a perspective on current capabilities for optically monitoring and controlling epitaxial growth, and discuss examples taken from recent work at Bellcore. |
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