|
|||||
|
|
Active Micromachined Integrated Terahertz Circuits |
|
| Authors: | H Kazemi S T G Wootton N J Cronin S R Davies R E Miles R D Pollard J M Chamberlain D P Steenson and J W Bowen |
| Institution: | (1) Department of Physics, University of Bath, Bath, BA2 7AY, United Kingdom;(2) Department of Electronic Engineering, University of Leeds, Leeds, LS2 9JT, United Kingdom;(3) Department of Physics, University of Nottingham, Nottingham, NG7 2RD, United Kingdom;(4) Department of Cybernetics, University of Reading, Reading, RG7 6AY, United Kingdom |
| Abstract: | Schottky barrier diodes have been integrated into on-chip rectangular waveguides. Two novel techniques have been developed to fabricate diodes with posts suitable for integration into waveguides. One technique produces diodes with anode diameters of the order of microns with post heights from 90 to 125 microns and the second technique produces sub-micron anodes with post heights around 20 microns. A method has been developed to incorporate these structures into a rectangular waveguide and provide a top contact onto the anode which could be used as an I.F. output in a mixer circuit. Devices have been fabricated and D.C. characterized. |
| Keywords: | Schottky barrier diode Micromachining Terahertz circuits Rectangular waveguide Platinum Plating Photolithography |
| 本文献已被 SpringerLink 等数据库收录！ | |