| 类金刚石碳薄膜对碳膜导电性能的影响 |
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| 引用本文： | 张鹏,张翠玲,李丽,刘文霞,王雄. 类金刚石碳薄膜对碳膜导电性能的影响[J]. 化学研究, 2011, 22(3): 5-7 |
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| 作者姓名： | 张鹏 张翠玲 李丽 刘文霞 王雄 |
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| 作者单位： | 中国石油石油化工研究院兰州化工研究中心,甘肃兰州,730060 |
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| 摘 要： | 以聚酰亚胺薄膜为原料,经炭化形成碳膜;进而在碳膜表面制备了类金刚石碳(DLC)薄膜,研究了制备条件对碳膜导电性能的影响.采用扫描电镜分析了薄膜的表面形貌和微观结构;采用X射线衍射仪分析了薄膜的晶体结构.结果表明,DLC薄膜的电阻率随着沉积时间的延长先减小后增加;当沉积时间达到3 h时,相应DLC薄膜的电阻率达到最小值5.66×10-5Ω.m.
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| 关 键 词： | 聚酰亚胺 碳膜 类金刚石碳薄膜 导电性能 |
Effect of diamond like carbon film on electrical conductivity of carbon film |
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| ZHANG Peng,ZHANG Cui-ling,LI Li,LIU Wen-xia,WANG Xiong. Effect of diamond like carbon film on electrical conductivity of carbon film[J]. Chemical Research, 2011, 22(3): 5-7 |
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| Authors: | ZHANG Peng ZHANG Cui-ling LI Li LIU Wen-xia WANG Xiong |
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| Affiliation: | ZHANG Peng,ZHANG Cui-ling,LI Li,LIU Wen-xia,WANG Xiong(Lanzhou Chemical Research Center of Petrochemical Research Institute,Petro China Company Limited,Lanzhou 730060,Gansu,China) |
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| Abstract: | Carbon films were prepared by carbonization of polyimide films as the raw materials.Then diamond-like carbon(DLC) films were deposited on the carbon films,and the effects of preparation conditions on the electrical conductivity of carbon films were studied.The surface morphology and microstructure of the carbon films and DLC films were analyzed using a scanning electron microscope,and their crystal structure was studied by means of X-ray diffraction.Results showed that the resistivity of the DLC films initi... |
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| Keywords: | polyimide carbon film diamond like carbon film electrical conductivity |
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