Excimer laser polymer ablation: twenty years on |
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Authors: | PE Dyer |
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Institution: | (1) Department of Physics, University of Hull, Hull, HU6 7RX, UK, UK |
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Abstract: | Research and development in excimer laser polymer ablation has been actively pursued for some twenty years, driven by interest
in the basic science as well as by numerous applications that have emerged for this high-resolution technique for material
removal. This paper reviews some of the basic mechanistic aspects of the UV laser–polymer interaction as a prelude to dealing
with practical matters related to polymer processing by ablation. Applications in micro-machining and potential areas for
future research are briefly covered.
Received: 7 October 2002 / Accepted: 8 February 2003 / Published online: 28 May 2003
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ID="*"Corresponding author. Fax: +44-1482/465-606, E-mail: p.e.dyer@hull.ac.uk |
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Keywords: | PACS: 79 20 DS 42 62 -b 61 82 PU |
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