刚柔耦合定位平台结构-运动-控制一体化建模

针对微电子制造行业等领域中的长行程高精度定位问题，提出了一种刚柔耦合定位平台，并建立了其结构-运动-控制一体化动力学仿真模型。首先，根据刚柔耦合定位平台的结构特点对浮动坐标法进行修改，建立了简洁高效的动力学仿真模型。其次，结合动力学模型、3阶S型曲线和经典的PID控制方法建立了结构-运动-控制一体化仿真模型。最后，通过数值算例对仿真模型的有效性进行了验证。数值模拟结果显示，建立的结构-运动-控制一体化仿真模型能够有效地对定位平台的工作过程进行模拟，为后续的结构优化、运动规划和控制系统设计等工作创造条件。

Integrated structure-motion-control modeling for rigid-flexible coupling positioning stage

Aiming at the problem of long stroke and high precision positioning in microelectronics manufacturing industry, a rigid-flexible coupling positioning stage (RFCPS) was proposed, and its integrated structure-motion-control dynamics simulation model was established.Firstly, the floating frame of reference formulation is modified according to the structural characteristics of RFCPS, and a simple and efficient dynamic simulation model is established.Secondly, By combining the dynamic simulation model, the third-order S-shaped curve and the classical PID control method, an integrated structure-motion-control simulation model is established.Finally, the effectiveness of the simulation model is verified by means of numerical examples.The numerical simulation results show that the integrated structure-motion-control simulation model can effectively simulate the working process of the positioning stage, creating conditions for the subsequent structural optimization, motion planning, control system design and other work.