Characterization of ablation plumes and carbon nitride films produced by reactive pulsed laser deposition in the presence of a magnetic field |
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| Authors: | F. Kokai K. Yamamoto Y. Koga S. Fujiwara R.B. Heimann |
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| Affiliation: | (1) Institute of Research and Innovation, 1201 Takada, Kashiwa, Chiba 277, Japan (Fax: +81-471/44-8811, E-mail: fkokai@iri.or.jp), JP;(2) National Institute of Materials and Chemical Research, Tsukuba, Ibaraki 305, Japan, JP;(3) Freiberg University of Mining and Technology, D-09596 Freiberg, Germany, DE |
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| Abstract: | x ) films in a nitrogen atmosphere within the range 5×10-4–4×10-1 Torr. In the presence of a magnetic field, the emission intensities of N2 (second positive system) and CN species in the graphite ablation plumes were altered significantly, depending on the pressure of the N2 environment. Corresponding to an intense CN emission, a magnetic field-induced enhancement of N incorporation – for example, up to 37% at an N2 pressure of 300 mTorr – and the formation of sp3 tetrahedral CN bonding were both observed in the films. This suggests that the arrival of CN species at the substrate surface with kinetic energies is important for film deposition. Received: 27 August 1997/Accepted: 8 September 1997 |
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| Keywords: | PACS: 81.05.Tp 81.15.Fg |
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