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Ordered Mesostructured Silica Films: Effect of Pore Surface on its Sensing Properties
Authors:P Falcaro  J Mio Bertolo  P Innocenzi  Heinz Amenitsch  A Bearzotti
Institution:(1) Dipartimento di Ingegneria Meccanica, Settore Materiali, Università di Padova, via Marzolo 9, 35131 Padova, Italy;(2) IMM-CNR Sez. di Roma, Area di Ricerca di Roma ldquoTor Vergatardquo, via Fosso del Cavaliere 100, 00133 Rome, Italy;(3) Dipartimento di Architettura e Pianificazione, Laboratorio di Scienza dei materiali e Nanotecnologie, Università di Sassari, Palazzo Pou Salit, Piazza Duomo 6, 07041 Alghero, Sassari, Italy;(4) Institute of Biophysics and X-ray Structure Research, Austrian Academy of Sciences, Schmiedelstr. 6, A-8042 Graz, Austria;(5) IMM-CNR Sez. di Roma, Area di Ricerca di Roma ldquoTor Vergatardquo, via Fosso del Cavaliere 100, 00133 Rome, Italy
Abstract:An electrochemical resistive-type sensor device, with a mesoporous silica thin film as sensitive membrane, has been developed and characterised. The silica film has been obtained via evaporation-induced self-assembly (EISA) using a tri-block copolymer (Pluronic F-127) as templating agent. It has been deposited by dip-coating on a silicon substrate with metallic interdigitated electrodes. Fast, reversible and reproducible electrical responses to relative humidity changes have been observed for the sensor device. The conduction mechanism has been related to chemical properties, structural order and surface morphology of the porosity in the silica film, confirming the dependence on the film preparation method and overall the importance of calcination temperature.
Keywords:self-assembling  mesostructured materials  thin film  Grotthus conduction  humidity sensor
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