首页 | 本学科首页   官方微博 | 高级检索  
     


Growth and Characterisation of Silicon Crystallites on Laser Structured Glass
Authors:T. Boeck  Th. Teubner  K. Schmidt  P.-M. Wilde  M. Lorenz
Abstract:Selective growth of silicon crystallites on glass, seeded from silicon saturated metallic solution droplets is demonstrated. These droplets are deposited in micropore arrays which are generated in the glass substrate by ultrashort laser pulses. In this way, an equidistant distribution of crystallites can be achieved by preferred nucleation in the micropores. Additionally, a crystallite selection occurs corresponding to the tip geometry. The material transport is governed by the vapour-liquid-solid (VLS) mechanism. The morphological characterization of micropores and grown crystallites is performed by Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM) and Focused Ion Beam (FIB) method.
Keywords:Vapour-Liquid-Solid (VLS) Growth  Si on Glass  Focused Ion Beam (FIB) method
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号