Langmuir Probe Measurement of the Electron Temperature in the Plasma Plume Formed by Pulsed Laser Deposition of Bi-Sr-Ca-Cu-O |
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Authors: | Jan Wild, Pavel Kudrna, Tomá Gronych, Tomá Jirsá k, Pavel Kubá t, Zdenk Zelinger Svatopluk Civi |
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Affiliation: | (1) Department of Electronics and Vacuum Physics, Faculty of Mathematics and Physics, Charles University, V Holeovikách 2, 180 00 Praha 8, Czech Republic;(2) Acad. Sci. CR, J. Heyrovský Institute of Physical Chemistry, Dolejkova 3, 182 23 Praha 8, Czech Republic |
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Abstract: | The electron temperature of the plasma formed during pulsed laser deposition of Bi-Sr-Ca-Cu-O target was measured using Langmuir probe. The main parameters of the experiment were as follows: The distance of the probe from the target was in the range of (4-6) mm, the basic working pressure was 2×10–3 Pa and the planar pulse energy density of laser beam was approximately 8 J/cm2. The obtained values of electron temperature were in the range of (1.0-2.5) eV. Presented results are discussed from the point of view of different theories of plasma splitting. |
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Keywords: | pulsed laser deposition Langmuir probe Bi-Sr-Ca-Cu-O |
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