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Langmuir Probe Measurement of the Electron Temperature in the Plasma Plume Formed by Pulsed Laser Deposition of Bi-Sr-Ca-Cu-O
Authors:Jan Wild, Pavel Kudrna, Tomá   Gronych, Tomá   Jirsá  k, Pavel Kubá  t, Zdenk Zelinger  Svatopluk Civi
Affiliation:(1) Department of Electronics and Vacuum Physics, Faculty of Mathematics and Physics, Charles University, V Hole"scaron"ovi"ccaron"kách 2, 180 00 Praha 8, Czech Republic;(2) Acad. Sci. CR, J. Heyrovský Institute of Physical Chemistry, Dolej"scaron"kova 3, 182 23 Praha 8, Czech Republic
Abstract:The electron temperature of the plasma formed during pulsed laser deposition of Bi-Sr-Ca-Cu-O target was measured using Langmuir probe. The main parameters of the experiment were as follows: The distance of the probe from the target was in the range of (4-6) mm, the basic working pressure was 2×10–3 Pa and the planar pulse energy density of laser beam was approximately 8 J/cm2. The obtained values of electron temperature were in the range of (1.0-2.5) eV. Presented results are discussed from the point of view of different theories of plasma splitting.
Keywords:pulsed laser deposition  Langmuir probe  Bi-Sr-Ca-Cu-O
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