Two-dimensional atomic hydrogen concentration maps in hot-filament diamond-deposition environment |
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Authors: | J Larjo H Koivikko K Lahtonen R Hernberg |
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Institution: | (1) Tampere University of Technology, Optics Laboratory, P.O. Box 692, 33101 Tampere, Finland, FI |
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Abstract: | This paper reports the two-dimensional mapping of atomic hydrogen concentration with two-photon excited laser induced fluorescence
in a multi-wire grid hot-filament chemical vapor deposition reactor. The measurements were made in a diamond film deposition
environment under different filament temperatures and wire configurations. The measurement was calibrated with a titration
reaction using NO2 as a titrant. The kinetic gas temperature in the reactor was measured from the Doppler broadening of the Lyman-β transition
excited in the fluorescence. The filament temperature was found to have a significant effect on atomic hydrogen production
and transfer to the substrate. The axial concentration distributions were compared to a one-dimensional kinetic gas–surface
chemistry model with good agreement. The model produced a reasonable estimate for the bulk diamond film growth rate.
Received: 25 June 2001 / Revised version: 15 February 2002 / Published online: 2 May 2002 |
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Keywords: | PACS: 32 50 47 70 |
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