Optical properties from SRSO/SiO2 multilayers in planar microcavities

We report on the fabrication and characterization of an efficient and CMOS compatible Si-based light source. Silicon-rich silicon oxide (SRSO)/SiO₂ superlattices-doped planar optical microcavities have been grown by reactive magnetron sputtering. The devices were studied using reflectance and photoluminescence measurements. The reflectivity of the resonator is above 99.9% and the quality factor is reaching a value of 100. Modification of silicon nanocrystals emission is clearly observed in the visible and reveals narrow, intense and highly directional emission properties.