Resonant-ultrasound spectroscopy for studying annealing effect on elastic constant of thin film

In this paper, we study the elastic property of thin films using resonant-ultrasound spectroscopy (RUS). RUS determines the elastic constants of a solid from its resonance frequencies of free vibration. There were two problems to be solved for applying RUS to thin films: accurate measurement of the resonance frequencies and mode identification of each resonance frequency. We solve these problems using the tripod needle transducers and the laser-Doppler interferometry (LDI). In this paper, we describe the RUS/LDI measurement setup we developed, and show the relationship between the elastic constant and annealing temperature for Cu thin films. Then, we discuss the effects of recrystallization and recovery on the elastic constant referring the X-ray diffraction measurement.