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Accurate extraction of trap depth responsible for RTS noise in nano-MOSFETs
Authors:Ma Zhong-F  Zhang Peng  Wu Yong  Li Wei-Hu  Zhuang Yi-Qi and Du Lei
Institution:School of Microelectronics, Xidian University, Xi'an 710071, China
Abstract:This paper presents an accurate analytical model of the random telegraph signal (RTS) noise time-constant ratio (\bar {τ}c/ \bar {τ}e for RTS noise in nano-MOSFETs, in which the Coulomb-blockade effect on trapping and detrapping processes was taken into account. Based on this new model, the depth of the trap responsible for RTS noise in a sample n-type nano-MOSFET is extracted. The results show that large errors will be introduced to the calculated trap depth when the Coulomb-blockade effect is neglected.
Keywords:trap  RTS noise  nano-MOSFETs
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