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Micromachining by CO2 laser ablation: Building blocks for a multiport integrated device |
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| Authors: | GV Vázquez A Harhira R Kashyap RG Bosisio |
| Institution: | a Centro de Investigaciones en Óptica, Loma del Bosque 115, Lomas del Campestre, 37150 León, Guanajuato, Mexico b Advanced Photonics Concepts Lab, Department of Engineering Physics, Ecole Polytechnique de Montreal, Montreal, Canada H3C 3A7 c Centre for Radio and Electrical Engineering Research, Department of Electrical Engineering, Ecole Polytechnique de Montreal, Montreal, Canada H3C 3A7 |
| Abstract: | We report on the design and fabrication of complex microcomponents based on multimode optical interference, using a CO2 laser ablation technique. Mode confinement, power division and losses are assessed. Power splitters show a good balance in the intensity division but beam combiners exhibit a variation in output power. The devices are compact and show a low sensitivity to imperfections in the fabrication process. The results demonstrate the technique's potential to develop multiport integrated circuits. |
| Keywords: | Beam combiner Laser ablation Multimode interference Power splitter |
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