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Structural and electrical characterization of annealed Si_(1-x)C_x/SiC thin film prepared by magnetron sputtering |
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| Authors: | Huang Shi-Hua Liu Jian |
| Abstract: | SiC, magnetron sputtering, annealing, leakage current |
| Keywords: | SiC magnetron sputtering annealing leakage current |
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