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Electrical and optical properties of Sb-doped ZnO thin films synthesized by sol–gel method
引用本文:曹萌萌,赵小如,段利兵,刘金茹,关蒙萌,郭文瑞. Electrical and optical properties of Sb-doped ZnO thin films synthesized by sol–gel method[J]. 中国物理 B, 2014, 0(4): 598-602
作者姓名:曹萌萌  赵小如  段利兵  刘金茹  关蒙萌  郭文瑞
基金项目:Project supported by the National Natural Science Foundation of China(Grant No.51172186);the Specialized Research Fund for the Doctoral Program of Higher Education,China(Grant No.20106102120051);the Natural Science Basic Research Plan in Shaanxi Province,China(Grant No.2013JQ6019)
摘    要:Sb-doped ZnO thin films with different values of Sb content (from 0 to 1.1 at.%) are deposited by the sol-gel dip- coating method under different sol concentrations. The effects of Sb-doping content, sol concentration, and annealing ambient on the structural, optical, and electrical properties of ZnO films are investigated. The results of the X-ray diffraction and ultraviolet-visible spectroscopy (UV-VIS) spectrophotometer indicate that each of all the films retains the wurtzite ZnO structure and possesses a preferred orientation along the c axis, with high transmittance (〉 90%) in the visible range. The Hall effect measurements show that the vacuum annealed thin films synthesized in the sol concentration of 0.75 mol/L each have an adjustable n-type electrical conductivity by varying Sb-doping density, and the photoluminescence (PL) spectra revealed that the defect emission (around 450 nm) is predominant. However, the thin films prepared by the sol with a concentration of 0.25 mol/L, despite their poor conductivity, have priority in ultraviolet emission, and the PL peak position shows first a blue-shift and then a red-shift with the increase of the Sb doping content.

关 键 词:ZnO薄膜  光学特性  电学性能  锑掺杂  凝胶法  溶胶  合成  掺杂浓度

Electrical and optical properties of Sb-doped ZnO thin films synthesized by sol-gel method
Abstract:Sb-doped ZnO thin films, electrical and optical properties, sol concentrations, annealing ambient
Keywords:Sb-doped ZnO thin films  electrical and optical properties  sol concentrations  annealing ambient
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