象限探测器非均匀性的影响分析及软校正算法

定量分析了四象限探测器用于目标跟踪时，其光电响应不均匀性对输出特性线性度及跟踪定位准确度的影响，给出了不均匀性校正的下限.提出了一种综合补偿光分布、探测器暗电流、通道增益的多元软校正方法.该方法将非线性误差控制在5%，跟踪定位准确度2%.与补偿增益的硬件校正和不消除暗电流的软校正方法相比，非线性误差减小2%，定位准确度提高了近3%.

Analysis of the Non-uniformity Effect and Soft Correction Algorithm for Four-quadrant Detector

The non-uniformity effect of the four-quadrant detector on the output signal linearity and accuracy of trace were analyzed and position locating when the detector was used in the target trace, and the bottom limit to the non-uniformity was also given. Based on this, a multi-correction method, which used comprehensive compensation intensity distribution, dead current, and channel of amplifier coefficient was presented for the first time. By using this method, the non-linear error was limited to 5% and the accuracy of trace and position locating was 2%. Compared with the methods using the hardware correction of compensation channel of amplifier coefficient and the soft correction with dead current retained, the non-linear error was reduced to 2% and the accuracy of position locating was improved nearly 3% by the multi-correction method.