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合金溅射轰击诱发的吉布斯偏析现象
引用本文:郑里平.合金溅射轰击诱发的吉布斯偏析现象[J].原子核物理评论,2003,20(1):61-65.
作者姓名:郑里平
作者单位:中国科学院上海原子核研究所 上海; 中国科学院国际材料物理中心; 辽宁沈阳;
基金项目:国家自然科学基金资助项目(19675061,19875074)~~
摘    要:建立了包括质量效应、键合效应和轰击诱发吉布斯偏析效应的蒙特卡罗模拟程序;并对轰击诱发吉布斯偏析效应的两大特征(表面成分梯度特征和表面成分梯度的中间性特征)进行了研究.模拟解析了为何在被轰击合金表面形成了一个偏析元素的成分梯度;为何被轰击合金表面的成分梯度、溅射角分布和溅射产额具有中间性特征. In 1982, phenomena of bombardment induced Gibssian segregation(BIGS) during alloy sputtering were found at low temperature. By using Monte Carlo(MC) simulation programs including mass effect, surface binding energy effect and bombardment induced Gibssian segregation effect, we especially study two important characters of BIGS (one is the character of the surface composition gradient of BIGS, and another is the intermediate character of the surface composition gradient of BIGS). The MC simulations give...

关 键 词:合金溅射    轰击诱发吉布斯偏析    MonteCarlo模拟
文章编号:1007-4627(2003)01-0061-05
收稿时间:1900-01-01
修稿时间:2002年10月17

Phenomena of Bombardment-induced Gibssian Segregation during Alloy Sputtering
ZHENG Li-ping.Phenomena of Bombardment-induced Gibssian Segregation during Alloy Sputtering[J].Nuclear Physics Review,2003,20(1):61-65.
Authors:ZHENG Li-ping
Institution:(Shanghai Institute of Nuclear Research; Chinese Academy of Sciences; Shanghai 201800; China; International Centre for Material Physics; Shenyang 110016; China);
Abstract:In 1982, phenomena of bombardment induced Gibssian segregation(BIGS) during alloy sputtering were found at low temperature. By using Monte Carlo(MC) simulation programs including mass effect, surface binding energy effect and bombardment induced Gibssian segregation effect, we especially study two important characters of BIGS (one is the character of the surface composition gradient of BIGS, and another is the intermediate character of the surface composition gradient of BIGS). The MC simulations give...
Keywords:alloy sputtering  bombardment-induced Gibbsian segregation  Monte Carlo simulation
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