Woodpile photonic crystals composed of air columns |
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Authors: | T Katsuyama K Hosomi H Yamada S Goto K Aoki Y Arakawa |
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Institution: | aNanoelectronics Collaborative Research Center, Institute of Industrial Science, The University of Tokyo, 4-6-1, Komaba, Meguro-ku, Tokyo 153-8505, Japan;bOptoelectronic Industry and Technology Development Association, Sumitomo Edogawabashiekimae Building, Sekiguchi 1-Chome, Bunkyo-ku, Tokyo 112-0014, Japan;cCentral Research Laboratory, Hitachi Ltd., Kokubunji, Tokyo 185-8601, Japan |
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Abstract: | Silicon-based woodpile photonic crystals (PhCs) composed of air columns have a large gap/midgap ratio exceeding 20% over a wide dimensional range of the cross section of the air column when the cross section is deformed to a rectangular shape extended normal to the stacking direction. Such a PhC structure can be formed using a simple technique based on 45° dry etching. Furthermore, introducing twin air columns with small cross sections instead of corresponding mother air columns yields a defect state at the region where the columns cross. Since the fabrication process is a planar-type Si wafer process, fabricated PhCs can be easily combined with conventional electronic circuits and optical elements, such as Si waveguides and switches. |
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Keywords: | 3D photonic crystal Woodpile Band gap Silicon material |
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