X-ray topography analysis of bulk acoustic wave resonators

X-ray topography is first used to totally examine the fundamental modes of acoustic oscillations in the bulk-acoustic-wave (BAW) resonator on the base of an AT-cut quartz crystal at the first and third harmonics. As is evident from the experiments, the anharmonic longitudinal oscillations of the resonator can be visualized, just as the fundamental transverse acoustic oscillations can be. The amplitude-frequency response (AFR) is related to the frequency dependence of diffracted x-ray intensity.