Speciation analysis of oxides with static secondary ion mass spectrometry

Speciation analysis of inorganic solids, without dissolution of the sample, aims at specific molecular information. Two potentially useful microanalytical techniques emerge, namely, laser microprobe mass spectrometry (LMMS) and static secondary ion mass spectrometry (S-SIMS). This paper focuses on the molecular characterisation of oxides by application of the S-SIMS method. For this purpose, mass spectra of pure oxides were acquired under static conditions. Analytical parameters such as repeatability, accuracy and resolution were assessed. Also, the peak patterns in the mass spectra are discussed in connection with the older Plog model, describing the relative ion yield as a function of the cluster size. Finally, a comparison is made with the mass spectra from a S-SIMS library and with those obtained by Fourier transform LMMS. Copyright 1999 John Wiley & Sons, Ltd.