| 太阳能电池制绒设备研究的几点心得 |
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| 引用本文： | 张晓红,王锐廷.太阳能电池制绒设备研究的几点心得[J].电子工业专用设备,2007,36(6):24-25,39. |
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| 作者姓名： | 张晓红 王锐廷 |
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| 作者单位： | 北京七星华创电子股份有限公司微电子设备分公司,北京,100016 |
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| 摘 要： | 着重对太阳能电池制绒工艺的研究进行了阐述,并以研究所得的工艺数据为基础,对制绒设备的关键部件——工艺槽体的设计进行了详细说明,保证所研发的最终设备满足了大规模生产线对制绒设备的需要。
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| 关 键 词： | 太阳电池 单晶硅 制绒 |
| 文章编号： | 1004-4507（2007）06-0024-02 |
| 修稿时间： | 2007-05-10 |
What We Learned by Designing the Solar Cell's Etching Equipment |
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| ZHANG Xiao-hong,WANG rui-ting.What We Learned by Designing the Solar Cell''''s Etching Equipment[J].Equipment for Electronic Products Marufacturing,2007,36(6):24-25,39. |
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| Authors: | ZHANG Xiao-hong WANG rui-ting |
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| Institution: | Microelectronic Equipment Branch of Beijing SevenStar Huachuang Electronics Co., Ltd. Beijing 100016, China |
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| Abstract: | In this paper we mainly described solar cell's etching technique based on what we have achieved during the designing process of the wet benches' structure. |
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| Keywords: | Solar cell Monocrystalline Etching |
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