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Growth of single wall carbon nanotubes using PECVD technique: An efficient chemiresistor gas sensor
Affiliation:1. Department of Physics, Jamia Millia Islamia, New Delhi 110025, India;2. Centre for Nanoscience and Nanotechnology, Jamia Millia Islamia, New Delhi 110025, India;1. Department of Mechanical Engineering, Najafabad Branch, Islamic Azad University, Najafabad, Iran;2. Mechanical Engineering Department, University of Hormozgan, Bandar Abbas, Iran;3. Young Researchers and Elite club, Najafabad Branch, Islamic Azad University, Najafabad, Iran;1. Department of Biomedical Engineering, National Cheng Kung University, Tainan, Taiwan;2. Graduate Institute of Biomedical Engineering, National Chung Hsing University, Taichung, Taiwan;3. Biomedical Engineering and System Bioinformatics Research Center, Kaohsiung Medical University, Taiwan;4. Medical Device Innovation Center (MDIC), National Cheng Kung University, Tainan, Taiwan;5. National Applied Research Laboratories, Taipei 106, Taiwan;1. Department of Physics, Jadavpur University, Kolkata 700032, India;2. Department of Electronics and Telecommunication Engineering, Jadavpur University, Kolkata 700032, India;1. Bayburt University, Engineering Faculty, Electrical and Electronics Engineering, TR-69100, Bayburt, Turkey;2. Ataturk University, Graduate School of Natural and Applied Sciences, Department of Nanoscience and Nanoengineering, TR-25240, Erzurum, Turkey
Abstract:In this work, the uniform and vertically aligned single wall carbon nanotubes (SWCNTs) have been grown on Iron (Fe) deposited Silicon (Si) substrate by plasma enhanced chemical vapor deposition (PECVD) technique at very low temperature of 550 °C. The as-grown samples of SWCNTS were characterized by field emission scanning electron microscope (FESEM), high resolution transmission electron microscope (HRTEM) and Raman spectrometer. SWCNT based chemiresistor gas sensing device was fabricated by making the proper gold contacts on the as-grown SWCNTs. The electrical conductance and sensor response of grown SWCNTs have been investigated. The fabricated SWCNT sensor was exposed to ammonia (NH3) gas at 200 ppm in a self assembled apparatus. The sensor response was measured at room temperature which was discussed in terms of adsorption of NH3 gas molecules on the surface of SWCNTs. The achieved results are used to develope a miniaturized gas sensor device for monitoring and control of environment pollutants.
Keywords:Carbon nanotubes  Chemical vapor deposition  Electron microscopy  Raman spectroscopy  Gas sensing
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