1. Physics Department, Shanghai Jiaotong University, Shanghai 200240, China 2. Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
Abstract:
Multilayers always dissolve some gas atoms during sputtering. In this paper, we develop a new method to study the effect of gas atoms on X-ray reflectance of the multilayer. Our theoretical analysis shows that this effect depends not only on the content of gas atom but also on the wavelength and the grazing angle. The shorter the wavelength and the bigger the grazing angle, the stronger this effect of gas atoms. We fabricated Mo/Si multilayers under various sputtering pressures and measured their small angle X-ray diffraction spectra. The measured results coincide with those calculated by our method.
