纳米孔阵列阳极氧化铝膜的制备和表征

本文通过在0℃、0.5mol·L^-1的草酸溶液中阳极氧化高纯铝片的方法制得了阳极氧化铝(AAO)膜，并用扫描电子显微镜(SEM)和原子力显微镜(AFM)对AAO膜的形貌和结构进行了表征。结果表明，阻挡层AAO膜中大小一致的膜胞在铝/氧化铝界面上排成六方形阵列;有孔层AAO膜中含有高度有序的纳米孔阵列和膜胞阵列，并且孔的直径和膜胞的尺寸都具有较窄的分布。另外，考察了阳极氧化电压对膜胞尺寸、孔径大小、孔密度和膜胞密度的影响，表明在一定的电压范围内，膜胞和孔径都随电压的升高而增大，而孔密度和膜胞密度却随电压的升高而减小。

Preparation and Characterization of Anodic Aluminum Oxide Films with Nanopore Arrays

A one-step preparation technology for the anodic aluminum oxide (AAO) films with nearly ideal nanoporearrays can be fabricated by anodizing highly pure aluminum foils in 0.5mol @ L-1 H2C2O4 solution at 0℃ for 48hunder different voltages is reported. The morphologies and structures of the obtained AAO films were characterizedby scanning electron microscope (SEM) and atom force microscope (AFM) . AFM image of barrier AAO at alu-minum/alumina interface was firstly observed. Results show that cells in barrier AAO are arranged in hexagonalarrays at aluminum/alumina interface. SEM and AFM analyses on porous AAO films show that cells in porous AAOfilms appear as columnar hexagons and each contains a pore in the center, so cells and pores in porous AAO filmsare also arranged in hexagonal arrays; and sizes of the cells and diameters of the pores which are on the scale ofnanometer have narrow distribution. Furthermore, the mechanism on arrangement of cells and pores, the effect ofexperimental conditions on quality of the obtained AAO films were discussed. Results indicate that sizes of cells anddiameters of pores in porous AAO films increase with the height of anodizing voltage, while densities of pores anddensities of cells decrease with the height of anodizing voltage.