| 钟罩式高温烧结炉 |
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| 引用本文： | 魏唯.钟罩式高温烧结炉[J].微细加工技术,1998(1):55-62. |
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| 作者姓名： | 魏唯 |
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| 作者单位： | 电子工业部第４８研究所 |
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| 摘 要： | 研制出一台满足集成电路微组装工艺所需的高温烧结炉，介绍该烧结炉的结构组成和设计原理。
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| 关 键 词： | 高温烧结炉，微组装工艺 |
HIGH TEMPERATURE BELL SINTERING FURNACE |
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| Wei Wei.HIGH TEMPERATURE BELL SINTERING FURNACE[J].Microfabrication Technology,1998(1):55-62. |
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| Authors: | Wei Wei |
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| Institution: | 48th Research Institute of
Ministry of Electconics Industry Changsha 410111 |
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| Abstract: | A high Temperature bell sintering
furnace has been developed for mi- cropackaging technology in IC fabrication. It's
constitution,construction and de- sign principles are described. |
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| Keywords: | high tmperature sintering furnace mircopackaging technology |
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