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p-type macroporous silicon having three-dimensional structure
Authors:Lee Sung-Ho  Maeda Ryutaro
Affiliation:National Institute of Advanced Industrial Science and Technology, 1-2 Namiki, Tsukuba, Ibaraki 305-8564, Japan. sungho-lee@aist.go.jp
Abstract:Macroporous silicon with three-dimensional structure was fabricated using organic-based electrolyte, dimethylformamide (DMF), in the p-type silicon. The obtained three-dimensional macroporous structures grew wholly along the <100> orientation of the p-type silicon wafer.
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