p-type macroporous silicon having three-dimensional structure |
| |
Authors: | Lee Sung-Ho Maeda Ryutaro |
| |
Affiliation: | National Institute of Advanced Industrial Science and Technology, 1-2 Namiki, Tsukuba, Ibaraki 305-8564, Japan. sungho-lee@aist.go.jp |
| |
Abstract: | Macroporous silicon with three-dimensional structure was fabricated using organic-based electrolyte, dimethylformamide (DMF), in the p-type silicon. The obtained three-dimensional macroporous structures grew wholly along the <100> orientation of the p-type silicon wafer. |
| |
Keywords: | |
本文献已被 PubMed 等数据库收录! |
|