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Reconstruction of extraordinary refractive index profile of O ion-implanted LiNbO3 single-mode channel waveguide based on beam propagation method and image processing
Authors:Xiangzhi Liu  Fei Lu  Ruifeng Zhang  Lei Wang  Haisong Wang
Institution:a School of Information Science and Engineering, Shandong University, Jinan 250100, China
b School of Physics and Microelectronics, Shandong University, Jinan 250100, China
c School of Science, Shandong University of Architecture and Engineering, Jinan 250100, China
Abstract:A method bases on beam propagation method and image processing is brought forward to reconstruct the extraordinary refractive index profile of the ion-implanted single-mode channel waveguide in lithium niobate. Channel waveguide is formed by O2+ ion implantation at three energies of (3.0, 3.6 and 4.5 MeV) and respective doses of (1.8, 2.2 and 4.8) × 1014 ions/cm2 in vacuum at room temperature. Only one enhanced-index mode is observed for extraordinary light at 1539 nm by prism-coupling method. TRIM’98 code is used to simulate the damage profile in channel waveguide. The modes pattern of TE and TM are measured by use of end-face coupling method.
Keywords:42  79  Gn  42  82  Et
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