Electrostatic fringes effect in systems with three charged parallel micro-beams

This paper presents the geometric analysis of the electric field edge effect in three charged rectangular conductors. This effect is taken into account for evaluating the electric capacitance and the force between charged bodies. The comprehensive model presented in this work includes seven geometric parameters to fully define the system and calculate a correction factor to the analytical model. The correction factor is presented as closed-form equations. Instead of using finite element models, these equations can be used for determining the gradient of capacitance and the electrostatic force between charged bodies.